Temperature sensing and vibration detection method

Wiring-free miniature temperature sensor

Overview

　Conventional thermal property measurements using thermistors and thermocouples require electrical wiring, which limits further improvements in sensor density and sensitivity. Resonant temperature sensors using in-plane mechanical resonators also suffer from low areal density, and laser-based readout becomes impractical when many sensing points are required.
　To overcome these limitations, the inventors developed a wiring-free temperature sensor that optically detects the resonance vibration amplitude of a high–aspect ratio micro-resonator. This architecture is well suited to dense array integration and achieves a temperature sensitivity of 32%/°C, exceeding that of frequency-shift-based resonant sensors (35 ppm/°C) and thermistors (2.0%/°C), making it promising for high-sensitivity temperature measurement.

Features・Outstandings

Product Application

・Thermal property measurement and analysis apparatus　
・Temperature distribution measurement of small areas　

IP Data

IP No.　 ： Not published　
Inventor ： INOMATA Naoki
keyword ： Temperature Detection, Temperature Sensing, Vibration Detection, High Sensitivity, High Accuracy, Miniaturization, High Density